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By Kash L. Mittal

This e-book chronicles the court cases of the 1st foreign Symposium on Adhesion features of skinny movies held lower than the auspices of MST meetings in Newark, New Jersey, October 28-29, 1999.

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The angular position of this peak clearly Influence of the ion bombardment on the stress in thin films 20 40 60 80 41 100 2 8 (degrees) Figure 4. X-ray diffraction patterns of the hafnia films deposited with different P values plotted vs. the diffraction angle. Broken lines indicate the diffraction planes. excludes a transition from the monoclinic to the cubic or tetragonal Hf02 phase. On comparing the X-ray diffraction patterns of the low P value samples with those of a standard hafnia powder the peak positions are similar.

30. D. W. Hoffmann and J. A. Thornton, J. Vac. Sci. Technol. 20, 355 (1982). 31. H. Windischmann, J. Vac. Sci. Technol. A 9, 2431 (1991). 32. P. B. Mirkarimi, K. F. McCarty and D. L. Medlin, Mater: Sci. Eng. R21,47 (1997). 33. P. Sigmund, Phys. Rev. 184, 383 (1969). 34. H. R. Kaufman, J. Vac. Sci. Technol. 15, 272 (1978). 35. J. Bottiger, J. A. Davies, P. Sigmund and K. B. Winterbon, Radiation EfSects 11,69 (1971). 36. E. Franke, H. Neumann, M. Zeuner, W. Frank and F. Bigl, Surf: Coat. Technol.

005. 40 and a = 20 for typical interstitial hardening in bcc metals such as Fe at room temperature [26]. Using these values, + 28 A . Misra and M. 1 GPa. The new yield strength of the film (at high bias deposition), crJ , is given as: eb = cyIeld + Agdefects. 2 GPa. This is in good agreement with the experimentally measured saturation in compressive stress. For post-deposition ion irradiation at high energies and to high doses, the selfinterstitials may form clusters or even collapse into interstitial loops [27].

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